APPARATUS FOR INSPECTING SUBSTRATE

PURPOSE: A substrate inspecting device is provided to prevent the generation of a detective substrate by founding defects of a substrate by at high probability, thereby enhancing a manufacturing yield. CONSTITUTION: A substrate inspecting device comprises a supporting frame, a substrate transferring...

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Bibliographic Details
Main Author MIN, SANG SIK
Format Patent
LanguageEnglish
Korean
Published 03.09.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:PURPOSE: A substrate inspecting device is provided to prevent the generation of a detective substrate by founding defects of a substrate by at high probability, thereby enhancing a manufacturing yield. CONSTITUTION: A substrate inspecting device comprises a supporting frame, a substrate transferring unit, an inspecting camera, and a lighting unit. The substrate transferring unit is installed in the upper side of the supporting frame and transfers the substrate. The inspecting camera is installed toward the substrate, thereby photographing an inspection surface of the substrate. The lighting unit provides inspecting lights to the inspection surface toward an oblique direction.
Bibliography:Application Number: KR20110016367