EVAPORATOR INCLUDING PARABOLIC REFLECTOR

• Main Authors: KIM, JUNG DAE, KOO, JONG MO, LEE, SANG HYUN, CHIN EIHO, SEO, POONG BOO
• Format: Patent
• Language: English; Korean
• Published: 24.05.2012
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PURPOSE: A deposition source having a parabolic reflective member is provided to improve the use efficiency of materials by limiting the dispersion angle of a deposited material sprayed to a substrate. CONSTITUTION: A deposition source comprises a deposited material storage unit(110) which stores a deposited material and has a top opening, a reflective member(10) which is coupled to the opening of the storage unit and has a parabolic interior shape to limit the spray direction of the deposited material sprayed through the opening of the storage unit, a first heating unit(17,120) which heats the storage unit, and a nozzle unit which is coupled to the interior side of the opening of the storage unit and sprays the deposited material.