COATING APPARATUS AND METHOD OF FORMING COATING LAYER USING THE SAME

• Main Authors: KIM, MYUNG SHIK, SHIN, DONG KI, JEONG, TAE KYUN, PARK, JONG IK, KIM, HYOUNG WON, JEONG, KYONG DEUK, CHOI, JEONG HAK
• Format: Patent
• Language: English; Korean
• Published: 07.05.2012
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SPRAYING OR ATOMISING IN GENERAL; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING

PURPOSE: A coating apparatus and a coating film forming method using the same are provided to prevent the occurrence of coating defects due to the thickness difference of photoresist. CONSTITUTION: A coating apparatus includes a nozzle part(125), a moving shaft(110), a rotary connecting member(112), a stage(140), and a washing unit(162). The nozzle part is composed of a nozzle tip(122) and a head(120). The nozzle tip sprays coating liquid, and the head stores the coating liquid. The moving shaft linearly moves the nozzle part. The rotary connecting member connects the moving shaft and the nozzle part and rotates the nozzle part. The stage is arranged at the lower side of the moving shaft. The nozzle part is fixed to the perpendicular direction of the surface of the stage.