LIGHT IRRADIATION DEVICE FOR EXPOSURE DEVICE, EXPOSURE DEVICE, EXPOSURE METHOD, PRODUCTION METHOD FOR SUBSTRATE, MASK AND EXPOSED SUBSTRATE

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Main Authors HASHINAGA HIROSHI, TOGASHI TAKUMI, MATSUZAKA MASAAKI, KAWASHIMA HIRONORI
Format Patent
LanguageEnglish
Korean
Published 20.04.2012
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
Online AccessGet full text

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Author TOGASHI TAKUMI
KAWASHIMA HIRONORI
HASHINAGA HIROSHI
MATSUZAKA MASAAKI
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SubjectTerms APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
Title LIGHT IRRADIATION DEVICE FOR EXPOSURE DEVICE, EXPOSURE DEVICE, EXPOSURE METHOD, PRODUCTION METHOD FOR SUBSTRATE, MASK AND EXPOSED SUBSTRATE
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