LIGHT IRRADIATION DEVICE FOR EXPOSURE DEVICE, EXPOSURE DEVICE, EXPOSURE METHOD, PRODUCTION METHOD FOR SUBSTRATE, MASK AND EXPOSED SUBSTRATE

• Main Authors: HASHINAGA HIROSHI, TOGASHI TAKUMI, MATSUZAKA MASAAKI, KAWASHIMA HIRONORI
• Format: Patent
• Language: English; Korean
• Published: 20.04.2012
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES