GAS INJECTION APPARATUS

PURPOSE: A gas spraying device is provided to drastically lower a defective rate while shortening manufacturing time. CONSTITUTION: A plate comprises a lower side and an upper side. At least one first spray hole is formed on the lower side. A processing gas is inputted onto the upper side from the o...

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Bibliographic Details
Main Authors KO, BU JIN, HAN, GEUN JO, LEE, JEONG BEOM
Format Patent
LanguageEnglish
Korean
Published 27.03.2012
Subjects
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Summary:PURPOSE: A gas spraying device is provided to drastically lower a defective rate while shortening manufacturing time. CONSTITUTION: A plate comprises a lower side and an upper side. At least one first spray hole is formed on the lower side. A processing gas is inputted onto the upper side from the outside. The upper side is opposite to the lower side. At least one nozzle module(160) includes a second spray hole. The nozzle module is combined in the upper side of the plate in order to be corresponded to one or more first opening.
Bibliography:Application Number: KR20120022946