GAS INJECTION APPARATUS

PURPOSE: A gas spraying device is provided to drastically lower a defective rate while shortening manufacturing time. CONSTITUTION: A second lower plate(120) is located between a first lower plate and an upper plate. The second lower plate has a plurality of second spraying holes. A third lower plat...

Full description

Saved in:
Bibliographic Details
Main Authors KO, BU JIN, HAN, GEUN JO, LEE, JEONG BEOM
Format Patent
LanguageEnglish
Korean
Published 23.03.2012
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:PURPOSE: A gas spraying device is provided to drastically lower a defective rate while shortening manufacturing time. CONSTITUTION: A second lower plate(120) is located between a first lower plate and an upper plate. The second lower plate has a plurality of second spraying holes. A third lower plate(130) is installed between the first and second lower plates to separate the first and second lower plates each other. The second lower plate has a plurality of openings. Each opening is connected to at least two first spraying holes and at least two second spraying holes.
Bibliography:Application Number: KR20120022945