LIQUID HEATING UNIT, LIQUID PROCESSING APPARATUS COMPRISING THE SAME, AND LIQUID PROCESSING METHOD

PURPOSE: A liquid heating unit, a liquid processing unit including the same, and a liquid processing method are provided to monitor a temperature of a tube or liquid storage bath by measuring a temperature of a reflection plate with a temperature sensor. CONSTITUTION: A lamp heater radiates radiatio...

Full description

Saved in:
Bibliographic Details
Main Authors NISHIDA TOSHIHIKO, NAKAYAMA HISAKAZU, ESHIMA KAZUYOSHI
Format Patent
LanguageEnglish
Korean
Published 22.03.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:PURPOSE: A liquid heating unit, a liquid processing unit including the same, and a liquid processing method are provided to monitor a temperature of a tube or liquid storage bath by measuring a temperature of a reflection plate with a temperature sensor. CONSTITUTION: A lamp heater radiates radiation. A cylindrical tube(15) has a cylindrical shape for inserting the lamp heater and is made of radiation transmitting materials. A liquid tube is arranged along the outer side of the cylindrical member and heats liquid flowing inside by the radiation. A reflection plate(13) covers the liquid tube and reflects the radiation. A liquid heating unit includes a first temperature sensor(17) which is attached to the outside of the reflection plate.
Bibliography:Application Number: KR20110073568