METHOD FOR TREATING A SURFACE COATED WITH A FILM, AND DEVICE FOR TREATING A SURFACE COATED WITH A FILM

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Bibliographic Details
Main Authors YOSHIHAMA TOMOYUKI, HAMAGUCHI JUNICHI, NAKANISHI SHIGEO, TOYODA SATORU, KODAIRA SHUJI, KAMADA KOUKICHI, HORITA KAZUMASA
Format Patent
LanguageEnglish
Korean
Published 20.03.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: KR20117030098