LOAD PORT APPARATUS

PURPOSE: A load port device is provided to have high rigidity while reducing weight by arranging a plurality of connection shafts between main bases. CONSTITUTION: A main base(13) is arranged on an installation plane of a semiconductor-treating apparatus while maintaining a predetermined angle. A co...

Full description

Saved in:
Bibliographic Details
Main Authors IGARASHI HIROSHI, MIYAJIMA TOSHIHIKO
Format Patent
LanguageEnglish
Korean
Published 08.03.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:PURPOSE: A load port device is provided to have high rigidity while reducing weight by arranging a plurality of connection shafts between main bases. CONSTITUTION: A main base(13) is arranged on an installation plane of a semiconductor-treating apparatus while maintaining a predetermined angle. A connecting plate(11) is fixed to the installation plane in order to connect the main base and the installation plane. A loading table(15) comprises a pod and is supported by the main base. A door(17) makes maintain a cover of the pod. A door driving tool(19) is supported by the main base and supports the door.
Bibliography:Application Number: KR20110086947