MULTIPLE SEAL RING STRUCTURE

• Main Authors: LIN JENG SHYAN, YAUNG DUN NIAN, TSAI SHU TING, LIU JEN CHENG, WANG WEN DE
• Format: Patent
• Language: English; Korean
• Published: 22.02.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE: A multiple seal ring structure is provided to protect an integrated circuit from degradation due to moisture, ionic contaminants and a dicing process. CONSTITUTION: A semiconductor substrate having a seal ring region and a circuit region is provided(102). An integrated circuit is formed on...