MULTIPLE SEAL RING STRUCTURE

PURPOSE: A multiple seal ring structure is provided to protect an integrated circuit from degradation due to moisture, ionic contaminants and a dicing process. CONSTITUTION: A semiconductor substrate having a seal ring region and a circuit region is provided(102). An integrated circuit is formed on...

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Bibliographic Details
Main Authors LIN JENG SHYAN, YAUNG DUN NIAN, TSAI SHU TING, LIU JEN CHENG, WANG WEN DE
Format Patent
LanguageEnglish
Korean
Published 22.02.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A multiple seal ring structure is provided to protect an integrated circuit from degradation due to moisture, ionic contaminants and a dicing process. CONSTITUTION: A semiconductor substrate having a seal ring region and a circuit region is provided(102). An integrated circuit is formed on the circuit region(104). A first seal ring structure is formed on a part of the circuit region(106). A second seal ring structure is formed on a part of the circuit region(108). A first passivation layer is formed on the first seal ring structure and the second seal ring structure(110). The first seal ring structure is adjacent to the circuit region and the second seal ring structure is adjacent to a scribe line.
Bibliography:Application Number: KR20110071066