THERMAL COMPRESS BONDING
PURPOSE: A thermal compression bonding is provided to improve the throughput of a bonding process by simultaneously bonding all workpieces on a substrate carrier. CONSTITUTION: A substrate carrier including workpiece holders(22) is prepared. First workpieces are arranged in the workpiece holders. Se...
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Main Authors | , , , |
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Format | Patent |
Language | English Korean |
Published |
21.02.2012
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: A thermal compression bonding is provided to improve the throughput of a bonding process by simultaneously bonding all workpieces on a substrate carrier. CONSTITUTION: A substrate carrier including workpiece holders(22) is prepared. First workpieces are arranged in the workpiece holders. Second workpieces are lifted and arranged to be placed one of the first workpieces. The first and second workpieces are simultaneously bonded by reflowing solder bumps between the first and second workpieces. |
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Bibliography: | Application Number: KR20100135783 |