IMPRINT APPARATUS

PURPOSE: An imprint apparatus is provided to uniformly combine a combination surface with a stamp by measuring an elastic force at an elastic force support unit. CONSTITUTION: A stamp(2) includes an imprint surface. A stage(4) is arranged at the bottom of the stamp. A driving unit(6) is operated at...

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Bibliographic Details
Main Authors KIM, WOO SAM, KIM, YONG TAE, YANG, JAE YOUNG, PARK, CHUN SEONG
Format Patent
LanguageEnglish
Korean
Published 26.12.2011
Subjects
AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR
SHAPING OR JOINING OF PLASTICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Summary:PURPOSE: An imprint apparatus is provided to uniformly combine a combination surface with a stamp by measuring an elastic force at an elastic force support unit. CONSTITUTION: A stamp(2) includes an imprint surface. A stage(4) is arranged at the bottom of the stamp. A driving unit(6) is operated at the stage in order to move the stamp. A support plate(8) is arranged at the upper side of the stamp. An elastic force support unit(10) supports the bottom of the stage elastically. A pressure measurement unit(12) measures the stage and the stamp.
Bibliography:Application Number: KR20100058123