METHOD AND DEVICE FOR SEPARATING SUSCEPTOR, SUBSTRATE TREATMENT APPARATUS APPLIED THEREOF

• Main Authors: LEE, HO YOUNG, JANG, WOOK SANG
• Format: Patent
• Language: English; Korean
• Published: 01.12.2011
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE: A method and device for separating a susceptor, a substrate treatment apparatus applied thereof are provided to prevent the falling of a susceptor by lifting the susceptor with being coupled with a top lead. CONSTITUTION: In a method and device for separating a susceptor, a substrate treatm...