METHOD AND DEVICE FOR SEPARATING SUSCEPTOR, SUBSTRATE TREATMENT APPARATUS APPLIED THEREOF

PURPOSE: A method and device for separating a susceptor, a substrate treatment apparatus applied thereof are provided to prevent the falling of a susceptor by lifting the susceptor with being coupled with a top lead. CONSTITUTION: In a method and device for separating a susceptor, a substrate treatm...

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Bibliographic Details
Main Authors LEE, HO YOUNG, JANG, WOOK SANG
Format Patent
LanguageEnglish
Korean
Published 01.12.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A method and device for separating a susceptor, a substrate treatment apparatus applied thereof are provided to prevent the falling of a susceptor by lifting the susceptor with being coupled with a top lead. CONSTITUTION: In a method and device for separating a susceptor, a substrate treatment apparatus applied thereof, a chamber comprises a chamber body(11) and a top lid(12) covering the opening of the chamber body. The top lid opens and closes the internal space of the chamber body while being ascended and descended by a chamber opening and closing device(30). A susceptor(20) is mounted on a susceptor supporting member(21). A heater is installed in a heating block(40) which is arranged in the lower of the susceptor. A gas injector discharges a process gas to the substrate on the susceptor.
Bibliography:Application Number: KR20100048632