MANUFACTURING APPARATUS OF SEMICONDUCTOR EQUIPMENT

The invention provides a semiconductor producing device, comprising a coating head which discharges adhesion agent to coating objects in the shape of multiple liquid drops, an object stage which is carried with the coating object and is movable below the coating head, a cleaning portion cleaning the...

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Bibliographic Details
Main Authors TAMAI SHINGO, AOYAGI HITOSHI, OGAWA MICHIO, TANAKA HIROYUKI, HARA SATORU, SHIGEYAMA AKIHIRO
Format Patent
LanguageEnglish
Korean
Published 31.10.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The invention provides a semiconductor producing device, comprising a coating head which discharges adhesion agent to coating objects in the shape of multiple liquid drops, an object stage which is carried with the coating object and is movable below the coating head, a cleaning portion cleaning the discharge face of the coating head, and a first moving drive portion which enables the cleaning portion to move from the working position of the discharge face of the coating head to the withdrawing position which is disposed below the moving area of the object stage and is free from the interference of the object stage.
Bibliography:Application Number: KR20110037492