ELECTROSTATIC END EFFECTOR APPARATUS, SYSTEMS AND METHODS FOR TRANSPORTING SUBSTRATES

Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate f...

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Bibliographic Details
Main Authors SUNDAR SATISH, HUDGENS JEFFREY C, TAYLOR WILLIAM NIXON JR, CHINTALAPATI PRUDHVI R, LACEKY WILLIAM P, SILVETTI MARIO DAVE, BRODINE JAFFREY A, HRUZEK DEAN C
Format Patent
LanguageEnglish
Korean
Published 05.10.2011
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.
Bibliography:Application Number: KR20117018722