MULTI CAPACITIVELY COUPLED ELECTRODE ASSEMBLY AND PROCESSING APPARTUS THE SAME

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Bibliographic Details
Main Authors HUH, NO HYUN, PARK, SUNG MIN, NAM, CHANG WOO, KIM, GYOO DONG, CHOI, DAI KYU
Format Patent
LanguageEnglish
Korean
Published 31.08.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: KR20100017416