APPARATUS AND METHOD FOR ALIGNING SUBSTRATE

• Main Author: YUK, NAM SU
• Format: Patent
• Language: English; Korean
• Published: 30.08.2011
• Subjects: BASIC ELECTRIC ELEMENTS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS

PURPOSE: An apparatus for aligning a substrate using central push stick and three distance sensors is provided to enable quick and accurate centering of the substrate without substrate rotation. CONSTITUTION: An apparatus for aligning a substrate comprises: the substrate for placing a rotation plate; a driving unit for rotating the rotation plate; a central push stick(12) which is mounted at the center of the rotation plate and supports the substrate; three distance sensors(20) which are placed in a same interval around the rotation plate and senses the distance to the rotation plate; and a control unit(30) which calculates eccentricity correction value.