PULSE TRAIN ANNEALING METHOD AND APPARATUS
PURPOSE: A pulse train annealing method and a device thereof are provided to adjust the shape, the peak power level, and/or an energy amount which are transferred from each pulse, thereby improving an annealing process. CONSTITUTION: A plurality of first energy pulses is transferred to the first par...
Saved in:
| Main Authors | , |
|---|---|
| Format | Patent |
| Language | English Korean |
| Published |
21.07.2011
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | PURPOSE: A pulse train annealing method and a device thereof are provided to adjust the shape, the peak power level, and/or an energy amount which are transferred from each pulse, thereby improving an annealing process. CONSTITUTION: A plurality of first energy pulses is transferred to the first part of a substrate(100). The substrate is moved. A plurality of second energy pulses is transferred to the second part of the substrate. Each of the first and second energy pulses includes at least thirty pulses. Each of the first and second energy pulses has a period which is from about 1nsec to about 10msec. A plurality of first and second energy pulses has the same energy. |
|---|---|
| AbstractList | PURPOSE: A pulse train annealing method and a device thereof are provided to adjust the shape, the peak power level, and/or an energy amount which are transferred from each pulse, thereby improving an annealing process. CONSTITUTION: A plurality of first energy pulses is transferred to the first part of a substrate(100). The substrate is moved. A plurality of second energy pulses is transferred to the second part of the substrate. Each of the first and second energy pulses includes at least thirty pulses. Each of the first and second energy pulses has a period which is from about 1nsec to about 10msec. A plurality of first and second energy pulses has the same energy. |
| Author | RANISH JOSEPH MICHAEL MOFFATT STEPHEN |
| Author_xml | – fullname: MOFFATT STEPHEN – fullname: RANISH JOSEPH MICHAEL |
| BookMark | eNrjYmDJy89L5WTQCgj1CXZVCAly9PRTcPTzc3X08fRzV_B1DfHwdwEKAHFAgGOQY0hoMA8Da1piTnEqL5TmZlB2cw1x9tBNLciPTy0uSExOzUstifcOMjIwNDQwsDAxNDFyNCZOFQDHwycS |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | KR20110084142A |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_KR20110084142A3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 13:59:40 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English Korean |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_KR20110084142A3 |
| Notes | Application Number: KR20110065030 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110721&DB=EPODOC&CC=KR&NR=20110084142A |
| ParticipantIDs | epo_espacenet_KR20110084142A |
| PublicationCentury | 2000 |
| PublicationDate | 20110721 |
| PublicationDateYYYYMMDD | 2011-07-21 |
| PublicationDate_xml | – month: 07 year: 2011 text: 20110721 day: 21 |
| PublicationDecade | 2010 |
| PublicationYear | 2011 |
| RelatedCompanies | APPLIED MATERIALS, INC |
| RelatedCompanies_xml | – name: APPLIED MATERIALS, INC |
| Score | 2.7966576 |
| Snippet | PURPOSE: A pulse train annealing method and a device thereof are provided to adjust the shape, the peak power level, and/or an energy amount which are... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | PULSE TRAIN ANNEALING METHOD AND APPARATUS |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110721&DB=EPODOC&locale=&CC=KR&NR=20110084142A |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMQU2EYyMUxOBnRxgCgYdyKWbZJycqptkYmxukppqkGaQDF7l62fmEWriFWEawcSQA9sLAz4ntBx8OCIwRyUD83sJuLwuQAxiuYDXVhbrJ2UChfLt3UJsXdRSYMN9oOO-1FycbF0D_F38ndWcnW29g9T8giByBhYmhiZGjswMrKCGNOikfdcwJ9C-lALkSsVNkIEtAGheXokQA1N2vjADpzPs7jVhBg5f6JQ3kAnNfcUiDFoBoT7BrgohQY6efgqOfn6ujj6efu4Kvq4hHv4uQAEgDghwDHIMCQ0WZVB2cw1x9tAFWhoP92O8dxCyC43FGFiAvf9UCQYF0-RUs2RLo0RjUOClWQKr1xRgC8jYwijVKMXAKMVIkkEGn0lS-KWlGbggg6TmukaGMgwsJUWlqbLAWrYkSQ4cOABt93nt |
| link.rule.ids | 230,309,786,891,25594,76906 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMQU2EYyMUxOBnRxgCgYdyKWbZJycqptkYmxukppqkGaQDF7l62fmEWriFWEawcSQA9sLAz4ntBx8OCIwRyUD83sJuLwuQAxiuYDXVhbrJ2UChfLt3UJsXdRSYMN9oOO-1FycbF0D_F38ndWcnW29g9T8giByBhYmhiZGjswMrOag83lBjacwJ9C-lALkSsVNkIEtAGheXokQA1N2vjADpzPs7jVhBg5f6JQ3kAnNfcUiDFoBoT7BrgohQY6efgqOfn6ujj6efu4Kvq4hHv4uQAEgDghwDHIMCQ0WZVB2cw1x9tAFWhoP92O8dxCyC43FGFiAvf9UCQYF0-RUs2RLo0RjUOClWQKr1xRgC8jYwijVKMXAKMVIkkEGn0lS-KXlGTg9Qnx94oHO9ZZm4IIMmJrrGhnKMLCUFJWmygJr3JIkOXBAAQBJ8Xza |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=PULSE+TRAIN+ANNEALING+METHOD+AND+APPARATUS&rft.inventor=MOFFATT+STEPHEN&rft.inventor=RANISH+JOSEPH+MICHAEL&rft.date=2011-07-21&rft.externalDBID=A&rft.externalDocID=KR20110084142A |