VAPORIZING APPARATUS AND CONTROL METHOD FOR THE SAME

• Main Authors: LEE, KYUNG BUM, LEE, JONG HA, JUNG, SUNG JAE, SEO, SEUNG CHEOL, CHO, WHANG SIN, GONG, DOO WON
• Format: Patent
• Language: English; Korean
• Published: 07.07.2011
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

PURPOSE: A vaporizing device and a control method thereof are provided to prevent performance decrease even in times of supply of a large amount of a raw material since a vaporization measuring unit does not make direct contact with raw gas. CONSTITUTION: A vaporizing device comprises a crucible(221), a heating unit(222), a temperature measuring unit(230), a power measuring unit(240) and a control unit(500). The crucible holds a raw material. The heating unit heats the crucible and vaporizes the raw material. The temperature measuring unit measures the temperature of the crucible. The power measuring unit measures the power applied to the heating unit. The control unit controls the amount of vaporization of the raw material based on one of the temperature change of the temperature measuring unit and the power change of the power measuring unit.