SUPPORT FOR A SEMICONDUCTOR WAFER IN A HIGH TEMPERATURE ENVIRONMENT

• Main Authors: SHIVE LARRY WAYNE, GILMORE BRIAN LAWRENCE, SNYDER TIMOTHY JOHN
• Format: Patent
• Language: English; Korean
• Published: 22.06.2011
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FURNACES; HEATING; KILNS; LIGHTING; MECHANICAL ENGINEERING; OVENS; RETORTS; SEMICONDUCTOR DEVICES; WEAPONS