A PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A METHOD THEREOF

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Bibliographic Details
Main Authors SUURONEN DAVID, RIAF ARTHUR P, MACINTOSH EDWARD. D, STONE DALE K, OSHIRO SHIGEO S
Format Patent
LanguageEnglish
Korean
Published 15.04.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Bibliography:Application Number: KR20117000939