MANUFACTURING METHOD OF FLEXIBLE PIEZOELECTRIC ELEMENT, FLEXIBLE PIEZOELECTRIC ELEMENT MANUFACTURED BY THE SAME

PURPOSE: A flexible piezoelectric device and a manufacturing method thereof are provided to stably rectify a current property by electrically connecting a plurality of unit piezoelectric devices and a capacitor to the same flexible substrate. CONSTITUTION: A piezoelectric device layer is laminated o...

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Main Authors KANG, SUK JOONG, KIM, SEUNG JUN, CHANG, JAE MYUNG, LEE, SANG YONG, PARK, KWI IL, LEE, KEON JAE
Format Patent
LanguageEnglish
Korean
Published 14.04.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A flexible piezoelectric device and a manufacturing method thereof are provided to stably rectify a current property by electrically connecting a plurality of unit piezoelectric devices and a capacitor to the same flexible substrate. CONSTITUTION: A piezoelectric device layer is laminated on a sacrificial substrate. The piezoelectric device layer is processed on the sacrificial substrate at a high temperature. A piezoelectric device(551) is formed by patterning the piezoelectric device layer. The piezoelectric device is separated from the sacrificial substrate by etching the sacrificial substrate. After the piezoelectric device is connected to a transfer layer, the piezoelectric device is transferred to the flexible substrate.
Bibliography:Application Number: KR20090095404