SCANNING MICROMIRROR

PURPOSE: A scanning micro-mirror is provided to control an area in which a maximal stress force is generated by preventing the stress concentration of a spring. CONSTITUTION: In a scanning micro-mirror, a mirror plate(20) is arranged in the open area of a substrate. A first gimbal(30) is arranged in...

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Bibliographic Details
Main Authors CHOI, DONG JUNE, KIM, TAE SIK, LEE, BYUNG GOO, LIM, TAE SUN
Format Patent
LanguageEnglish
Korean
Published 30.03.2011
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:PURPOSE: A scanning micro-mirror is provided to control an area in which a maximal stress force is generated by preventing the stress concentration of a spring. CONSTITUTION: In a scanning micro-mirror, a mirror plate(20) is arranged in the open area of a substrate. A first gimbal(30) is arranged in the open area between the substrate and the mirror plate and has a first curved part in the direction of the mirror plate along the X-axis of the open area. A second gimbal(40) is arranged in the open area between the first gimbal and the mirror plate and has second curved part along the first gimbal and the first curved part. A first elastic body(50) interlinks the substrate and the first curved part. A second elastic body(60) interlinks the first gimbal and the second gimbal. A third elastic body(70) interlinks the second gimbal and the mirror plate.
Bibliography:Application Number: KR20090090102