ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD AND STORAGE MEDIUM STORING COMPUTER PROGRAM FOR EXECUTING ULTRASONIC CLEANING METHOD

PURPOSE: An ultrasonic cleaning apparatus, an ultrasonic cleaning method, and a recording medium storing a computer program for executing the ultrasonic cleaning method are provided to generate ultrasonic vibration by a single ultrasonic oscillator, thereby miniaturizing an ultrasonic cleaning appar...

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Bibliographic Details
Main Authors SATO HIDEAKI, ESHIMA KAZUYOSHI, HARA HIROMI, HOSHINO HIROZUMI
Format Patent
LanguageEnglish
Korean
Published 16.03.2011
Subjects
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:PURPOSE: An ultrasonic cleaning apparatus, an ultrasonic cleaning method, and a recording medium storing a computer program for executing the ultrasonic cleaning method are provided to generate ultrasonic vibration by a single ultrasonic oscillator, thereby miniaturizing an ultrasonic cleaning apparatus with cleaning tubs. CONSTITUTION: The first cleaning tub(10a) and the second cleaning tub(10b) store cleaning liquid. A vibrator is installed in the cleaning tubs. A mega-sonic controller(40) generates ultrasonic vibration in each vibrator. An output switching device(50) switches a vibrator connected to an ultrasonic oscillator. A controller controls the ultrasonic oscillator and the output switching device.
Bibliography:Application Number: KR20100082527