LASER LIFT-OFF APPARATUS HAVING HEATER

PURPOSE: A laser liftoff apparatus having the heater is provided to easily focus the laser beam by alleviating the bending of the growth substrate by heating the growth substrate by using the heater in the laser liftoff apparatus. CONSTITUTION: A laser generator(100) emits the laser beam. A stage(20...

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Bibliographic Details
Main Authors YOU, JONG KYUN, KIM, CHANG YOUN, LEE, JOON HEE
Format Patent
LanguageEnglish
Korean
Published 04.03.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A laser liftoff apparatus having the heater is provided to easily focus the laser beam by alleviating the bending of the growth substrate by heating the growth substrate by using the heater in the laser liftoff apparatus. CONSTITUTION: A laser generator(100) emits the laser beam. A stage(200) supports the working object(300). The heater heats the working object. The working object comprises a first substrate, an epi layer formed on the first substrate, and a second substrate. A housing(400) includes the route of the laser beam in inside.
Bibliography:Application Number: KR20090079430