COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP
A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the...
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| Main Authors | , |
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| Format | Patent |
| Language | English Korean |
| Published |
13.01.2011
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber. |
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| AbstractList | A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber. |
| Author | CONTE ANDREA FERRIS MICHAEL LAURENCE |
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| Notes | Application Number: KR20107024101 |
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| RelatedCompanies | SAES GETTERS S.P.A |
| RelatedCompanies_xml | – name: SAES GETTERS S.P.A |
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| Snippet | A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP |
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