COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP

A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the...

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Bibliographic Details
Main Authors CONTE ANDREA, FERRIS MICHAEL LAURENCE
Format Patent
LanguageEnglish
Korean
Published 13.01.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.
Bibliography:Application Number: KR20107024101