METHOD OF PREPARING ORGANOMETALLIC COMPOUNDS

PURPOSE: A method for preparing a ultra-pure organic metal compound is provided to produce ultra-pure alkyl metal compound for chemical vapor deposition. CONSTITUTION: An organic metal compound is prepared by reacting metal salt and alkylating agent in a microchannel device under the presence of sol...

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Bibliographic Details
Main Authors LIPIECKI FRANCIS JOSEPH, MAROLDO STEPHEN G, SHENAI KHATKHATE DEODATTA VINAYAK, WARE ROBERT A
Format Patent
LanguageEnglish
Korean
Published 26.10.2010
Subjects
ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM
CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY
CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
THEIR RELEVANT APPARATUS
TRANSPORTING
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Summary:PURPOSE: A method for preparing a ultra-pure organic metal compound is provided to produce ultra-pure alkyl metal compound for chemical vapor deposition. CONSTITUTION: An organic metal compound is prepared by reacting metal salt and alkylating agent in a microchannel device under the presence of solvent. The purity of the organic metal compound is 99.99%. The metal salt is metal halide. The alkylating agent is further purified by the microchannel device. The alkylating agent contains trialkylaluminum compound, alkyl magnesium halide compound or alkyl lithium compound.
Bibliography:Application Number: KR20100092928