METHOD FOR TREATING WASTED ORGANIC SOLVENT CONTAINING A CROSSLINKABLE PHOTORESIST COMPONENT
PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a p...
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| Main Authors | , , , , |
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| Format | Patent |
| Language | English Korean |
| Published |
15.10.2010
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| Subjects | |
| Online Access | Get full text |
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| Abstract | PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a polymerization inhibitor to the waste organic solvent including a cross-linking photoresist component for controlling the cross-linking polymerization; and collecting an organic solvent from the waste organic solvent mixed with the polymerization inhibitor. |
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| AbstractList | PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a polymerization inhibitor to the waste organic solvent including a cross-linking photoresist component for controlling the cross-linking polymerization; and collecting an organic solvent from the waste organic solvent mixed with the polymerization inhibitor. |
| Author | LEE, MYUNG HO MUN, JAE WOONG JEONG, JIN BAE JEONG, HYUN CHEOL KANG, DO SOON |
| Author_xml | – fullname: JEONG, JIN BAE – fullname: MUN, JAE WOONG – fullname: JEONG, HYUN CHEOL – fullname: LEE, MYUNG HO – fullname: KANG, DO SOON |
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| Snippet | PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking... |
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| SubjectTerms | ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| Title | METHOD FOR TREATING WASTED ORGANIC SOLVENT CONTAINING A CROSSLINKABLE PHOTORESIST COMPONENT |
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