METHOD FOR TREATING WASTED ORGANIC SOLVENT CONTAINING A CROSSLINKABLE PHOTORESIST COMPONENT
PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a p...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
15.10.2010
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a polymerization inhibitor to the waste organic solvent including a cross-linking photoresist component for controlling the cross-linking polymerization; and collecting an organic solvent from the waste organic solvent mixed with the polymerization inhibitor. |
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Bibliography: | Application Number: KR20090029824 |