CHAMBER SYSTEM FOR A MINUTE TEMPERATURE CONTROL

PURPOSE: A chamber system for a minute temperature control is provided to increase an adiabatic effect by forming a multilayered thin purge space on the wall of a chamber. CONSTITUTION: An air inlet(3) is installed on the outer side of a chiller head(2) of a chamber(1) and a nozzle(4) and a sensor(5...

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Bibliographic Details
Main Author YOO, GI SUCK
Format Patent
LanguageEnglish
Korean
Published 17.09.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A chamber system for a minute temperature control is provided to increase an adiabatic effect by forming a multilayered thin purge space on the wall of a chamber. CONSTITUTION: An air inlet(3) is installed on the outer side of a chiller head(2) of a chamber(1) and a nozzle(4) and a sensor(5) are installed on the lower side of the chiller head. A multilayered purge space with a thin thickness is formed on the wall of the chamber. A conduit makes the temperature of a process air close to a room temperature. The process air is discharged by forming a purge space and a process space while interposing a partition.
Bibliography:Application Number: KR20090019744