METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE, METHOD FOR GENERATING A CLEANING GAS, AND CORRESPONDING CLEANING AND CLEANING GAS GENERATION ARRANGEMENTS

• Main Authors: WOLSCHRIJN BASTIAAN THEODOOR, EHM DIRK HEINRICH, MOORS JOHANNES HUBERTUS JOSEPHINA, STORM ARNOLD, STEIN THOMAS, TE SLIGTE EDWIN
• Format: Patent
• Language: English; Korean
• Published: 07.09.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; CLEANING; CLEANING IN GENERAL; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PREVENTION OF FOULING IN GENERAL; TRANSPORTING