METHOD AND APPARATUS FOR MEASURING SAMPLE USING INTERFEROMETER

PURPOSE: An interferometric sample shape measuring method and an apparatus thereof are provided to measure the shape or feature of the sample surface by obtaining the reflection light of the sample. CONSTITUTION: An interferometric sample shape measuring method comprises a stage(106), a light source...

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Bibliographic Details
Main Authors YIM, HAE DONG, O, BEOM HOAN, LEE, MIN WOO
Format Patent
LanguageEnglish
Korean
Published 25.08.2010
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:PURPOSE: An interferometric sample shape measuring method and an apparatus thereof are provided to measure the shape or feature of the sample surface by obtaining the reflection light of the sample. CONSTITUTION: An interferometric sample shape measuring method comprises a stage(106), a light source(101), a reference mirror(104), a light distributor(103), and an analyzing device(102). The stage moves or rotates a sample(105). The light source projects the detection light for the analysis of the sample. The reference mirror reflects the detection light. The light distributor distributes the detection light to the reference mirror and the sample. The analyzing device analyzes the detection light to determine the property of the sample.
Bibliography:Application Number: KR20090012363