WAFER PROBE TEST AND INSPECTION SYSTEM

An apparatus for electrically testing a semiconductor device is herein disclosed. The apparatus includes carriers for a semiconductor device and a probe card that are adapted for complementary registration with one another. The coupled carriers may be stacked or used in another high-density arrangem...

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Bibliographic Details
Main Authors SANDBACH REX H, SEUBERT RONALD C, HILTON GEOFFREY
Format Patent
LanguageEnglish
Korean
Published 27.07.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:An apparatus for electrically testing a semiconductor device is herein disclosed. The apparatus includes carriers for a semiconductor device and a probe card that are adapted for complementary registration with one another. The coupled carriers may be stacked or used in another high-density arrangement during electrical test or burn-in to improve test cell utilization.
Bibliography:Application Number: KR20097026186