YAW RATE SENSOR HAVING TWO SENSITIVE AXES

The invention relates to a yaw rate sensor, comprising a substrate (10), a bearing (20), an oscillating structure, which by means of springs (30) is rotatably suspended on the bearing (20) in order to perform a planar driving oscillating movement, and drive means for producing a planar driving oscil...

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Bibliographic Details
Main Authors KOHN OLIVER, GERHARDT CHRISTIAN, NEUL REINHARD, CLASSEN JOHANNES, GRACKI SEBASTIAN, FRANKE AXEL, KUHLMANN BURKHARD, KEHR KERSTEN
Format Patent
LanguageEnglish
Korean
Published 08.07.2010
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Summary:The invention relates to a yaw rate sensor, comprising a substrate (10), a bearing (20), an oscillating structure, which by means of springs (30) is rotatably suspended on the bearing (20) in order to perform a planar driving oscillating movement, and drive means for producing a planar driving oscillating movement of the oscillating structure. The essence of the invention is that the yaw rate sensor comprises first evaluation means for detecting a rotation in a first rotational axis and second evaluation means for detecting a rotation in a second rotational axis.
Bibliography:Application Number: KR20107010148