IMPRINT APPARATUS
PURPOSE: An imprint device is provided to simultaneously form functional patterns on both sides of a substrate using first and second stamps of a double-side imprinting unit. CONSTITUTION: An imprint device comprises a chamber unit(2), a vertical loading unit(4), a double-side imprinting unit(10), a...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
29.06.2010
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Subjects | |
Online Access | Get full text |
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Summary: | PURPOSE: An imprint device is provided to simultaneously form functional patterns on both sides of a substrate using first and second stamps of a double-side imprinting unit. CONSTITUTION: An imprint device comprises a chamber unit(2), a vertical loading unit(4), a double-side imprinting unit(10), and a driving unit(12) for imprint. The chamber unit provides chambers which have fixed size. The vertical loading unit loads a substrate(G) to stand the substrate inside the chamber unit. The double-side imprinting unit is composed of first and second stamps. The first and second stamps imprint one side and the other side of the substrate of the vertical loading unit. The driving unit for imprint drives the first and the second stamp. |
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Bibliography: | Application Number: KR20080130165 |