IMPROVED SILICON CARBIDE PARTICLES, METHODS OF FABRICATION, AND METHODS USING SAME

Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes, the particles can comprise nano-sized carbide particles, particularly silicon carbide particles having a surface chemistry simi...

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Bibliographic Details
Main Authors BAKSHI ABHAYA K, CHERIAN ISAAC K
Format Patent
LanguageEnglish
Korean
Published 23.06.2010
Subjects
ADHESIVES
ARTIFICIAL STONE
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
DYES
LIME, MAGNESIA
MANUFACTURE OR TREATMENT THEREOF
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
NATURAL RESINS
PAINTS
PERFORMING OPERATIONS
POLISHES
REFRACTORIES
SLAG
TRANSPORTING
TREATMENT OF NATURAL STONE
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Summary:Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes, the particles can comprise nano-sized carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.
Bibliography:Application Number: KR20107007976