BIO-SENSOR FOR MEASURING MAGNETORESISTIVE AND METHOD FOR MANUFACTURING THE SAME

PURPOSE: A biosensor for magnetic resistance measurement and a manufacturing method thereof are provided to manufacture a biosensor for convenient sample application by forming a sample application container in a sample contact metal film through etching of a substrate without a separate process. CO...

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Bibliographic Details
Main Authors CHUNG, MYUNG AE, SUH, JEONG DAE, BAEK, NAM SEOB, KIM, SANG HYEOB, JUNG, SANG DON
Format Patent
LanguageEnglish
Korean
Published 22.06.2010
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
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Summary:PURPOSE: A biosensor for magnetic resistance measurement and a manufacturing method thereof are provided to manufacture a biosensor for convenient sample application by forming a sample application container in a sample contact metal film through etching of a substrate without a separate process. CONSTITUTION: A method for manufacturing a biosensor for magnetic resistance measurement is as follows. A sample contact metal film(120), a dielectric layer(130), a magneto resistive sensor(150), and an electrode(160) are successively laminated on a substrate(100). The substrate is etched from the bottom so that the sample contact metal film is exposed and the rest unexposed part functions as a sample application container(180). A protective layer(170) for protecting the magneto resistive sensor and the electrode is formed. A metal layer(110) for adhesion enhancement is formed between the substrate and the sample contact metal film or/and between the sample contact metal film and the dielectric layer.
Bibliography:Application Number: KR20090089686