COATING FORMATION AGENT FOR PATTERN MICRO-FABRICATION, AND MICROPATTERN FORMATION METHOD USING THE SAME

PURPOSE: A coating agent for forming a micro pattern is provided to narrow a pattern width using the coating agent with a water-soluble peptide not to generate a defect. CONSTITUTION: A micro pattern is formed by coating a resist pattern on a substrate using a coating agent for forming the micro pat...

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Bibliographic Details
Main Authors ISHIKAWA KIYOSHI, UENO NAOHISA, YOSHIDA MASAAKI, SAWANO ATSUSHI, WAKIYA KAZUMASA
Format Patent
LanguageEnglish
Korean
Published 15.06.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A coating agent for forming a micro pattern is provided to narrow a pattern width using the coating agent with a water-soluble peptide not to generate a defect. CONSTITUTION: A micro pattern is formed by coating a resist pattern on a substrate using a coating agent for forming the micro pattern. The coating agent includes a water-soluble peptide and a water-soluble resin which contains composition unit with a nitrogen element.
Bibliography:Application Number: KR20090117753