HEATER BLOCK

PURPOSE: A heater block is provided to prevent an external air from penetrating through a gas hole by blocking the inside of a load from the outside using a sealing member. CONSTITUTION: A base block(110) includes a surface on which a substrate is received, a plurality of gas holes, and a heater mou...

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Bibliographic Details
Main Authors LEE, YUN GOO, PARK, DAI WON
Format Patent
LanguageEnglish
Korean
Published 07.06.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A heater block is provided to prevent an external air from penetrating through a gas hole by blocking the inside of a load from the outside using a sealing member. CONSTITUTION: A base block(110) includes a surface on which a substrate is received, a plurality of gas holes, and a heater mounting groove. The heater mounting groove is depressed from the opposite side to the surface. A load(130) has penetration holes connected to the gas holes and the heater mounting groove and blocks the gas holes from the outside by being combined with the opposite surface of the base block. A heater is mounted on the heater mounting groove and both sides of the heater are drawn out to the outside through the penetration holes respectively. A plurality of sealing members(170) are respectively installed between the heater and the penetration holes.
Bibliography:Application Number: KR20080118459