MEASUREMENT METHOD, STAGE APPARATUS, AND EXPOSURE APPARATUS

• Main Author: ARAI DAI
• Format: Patent
• Language: English; Korean
• Published: 04.06.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HOLOGRAPHY; MATERIALS THEREFOR; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TESTING

An exposure apparatus having improved positioning accuracy etc. of a stage achieved by reducing an influence of a variation in the refraction factor of surrounding gas. In the exposure apparatus, exposure light is applied to a wafer (W) on a wafer stage (WST) through a projection optical system (PL) to form a predetermined pattern on the wafer (W). The exposure apparatus has a scale provided at the wafer stage (WST), X-heads (66) for detecting positional information on the scale, a measurement frame (21) integrally supporting the X-heads (66) and having a linear expansion coefficient smaller than that of a body section of the wafer stage (WST), and a control device for obtaining information on displacement of the wafer stage (WST) from the result of detection by the X-heads (66).