UNIT FOR COATING A SUBSTRATE

PURPOSE: A unit for coating a substrate is provided to improve the productivity of a coating process by selectively using a nozzle according to the kind of the coating process. CONSTITUTION: A substrate transfer part(102) transfers a substrate(10) in a horizontal direction. Two nozzles(104, 106) sup...

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Bibliographic Details
Main Author PARK, JONG MO
Format Patent
LanguageEnglish
Korean
Published 04.06.2010
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
FREQUENCY-CHANGING
HOLOGRAPHY
MATERIALS THEREFOR
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Summary:PURPOSE: A unit for coating a substrate is provided to improve the productivity of a coating process by selectively using a nozzle according to the kind of the coating process. CONSTITUTION: A substrate transfer part(102) transfers a substrate(10) in a horizontal direction. Two nozzles(104, 106) supply photoresist composition to the top of the substrate according to the kind of the coating process. The substrate transfer part comprises an air blower(110) and a driving part(120). The air blower supplies the air to the lower surface of substrate in order to float the substrate.
Bibliography:Application Number: KR20080117197