METHOD AND ARRANGEMENT FOR POSITIONING A PROBE CARD

PURPOSE: A method and a device for controlling a position of a probe card are provided to prevent malfunction by applying a separation position and a contact position to the probe card after the probe card is changed. CONSTITUTION: A substrate holder comprises a probe needle(1) which includes a need...

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Bibliographic Details
Main Authors KANEV STOJAN, KIESEWETTER JORG, KREISSIG STEFAN, FLEISCHER HANS JURGEN
Format Patent
LanguageEnglish
Korean
Published 09.04.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PURPOSE: A method and a device for controlling a position of a probe card are provided to prevent malfunction by applying a separation position and a contact position to the probe card after the probe card is changed. CONSTITUTION: A substrate holder comprises a probe needle(1) which includes a needle tip(3) and is arranged in a probe card in order to be oriented in a right position. A setting device controls a substrate holder based on the probe card and includes a driving device with a memory which stores a contact position and a separation position. In a recording device, a recording axis line is oriented to a probe needle and is parallel to the substrate surface. A display device(2) provides a needle tip and the stored contact position, is connected to the memory of the driving device, and includes an input unit which changes the contact position.
Bibliography:Application Number: KR20080096512