PROCESS AND SYSTEM FOR PROVIDING ACETYLENE

PURPOSE: A process and a system for providing acetylene are provided to transfer acetylene to a high purity level for a semiconductor manufacturing process, and to increase use efficiency of acetylene cylinder capacity. CONSTITUTION: A process for providing a high purity acetylene comprising 100 ppm...

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Bibliographic Details
Main Authors MAYKUT TIMOTHY JOHN, IRVEN JOHN, KETKAR SUHAS NARAYAN, INMAN BENJAMIN JAMES ARTHUR, KARWACKI EUGENE JOSEPH JR, DOWNIE NEIL ALEXANDER
Format Patent
LanguageEnglish
Korean
Published 25.03.2010
Subjects
ACYCLIC OR CARBOCYCLIC COMPOUNDS
APPARATUS THEREFOR
CHEMISTRY
GENERAL METHODS OF ORGANIC CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
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Summary:PURPOSE: A process and a system for providing acetylene are provided to transfer acetylene to a high purity level for a semiconductor manufacturing process, and to increase use efficiency of acetylene cylinder capacity. CONSTITUTION: A process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprises: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20 deg.C to -50 deg.C; introducing the acetylene feed stream to a purifier at a temperature ranging from -50 deg.C to 30 deg.C to remove at least a portion of the solvent contained therein and provide the high purity acetylene.
Bibliography:Application Number: KR20090087525