SUSCEPTOR

PURPOSE: A susceptor is provided to preventing particles from generating while a substrate is transferred by protecting the lateral side or the lower side of the substrate from depositing of a thin film. CONSTITUTION: A susceptor includes a body part(121), a substrate loading part(125) and a guide p...

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Bibliographic Details
Main Authors PARK, SANG JOON, HAN, CHANG HEE, HEO, JIN PIL, CHO, BYUNG CHUL
Format Patent
LanguageEnglish
Korean
Published 18.03.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A susceptor is provided to preventing particles from generating while a substrate is transferred by protecting the lateral side or the lower side of the substrate from depositing of a thin film. CONSTITUTION: A susceptor includes a body part(121), a substrate loading part(125) and a guide part(126). The body part which is rotatable is arranged in a reaction chamber. The height of the substrate loading part is the same as the height of the upper side of the body part. The substrate is loaded on the substrate loading part. The guide part is upwardly protruded around the substrate loading part to guide the location of the substrate.
Bibliography:Application Number: KR20080088861