ALKALI-DEVELOPABLE PHOTOSENSITIVE RESIN COMPOSITION AND β-DIKETONE COMPOUND

• Main Authors: YAMADA TAKASHI, KIMIJIMA KOICHI, SATO NAOMI
• Format: Patent
• Language: English; Korean
• Published: 11.03.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP

Disclosed is an alkali-developable photosensitive resin composition containing (J) a photopolymerizable unsaturated compound having a structure which is obtained by an esterification reaction between (C) a polybasic acid anhydride and a hydroxy group of a reaction product that is obtained by adding (B) a compound having a β-diketone moiety or a compound having a β-ketoester group to a (meth)acryloyl group of (A) a compound having two or more (meth)acryloyl groups and a hydroxy group. As the compound having a β-diketone moiety, a novel compound that is a β-diketone compound represented by the general formula (I) below is preferably used. (In the formula (I), Rrepresents an alkyl group having 1-20 carbon atoms; Rrepresents R, OR, COR, SR, CONRRor CN; R, Rand Rindependently represent a hydrogen atom, an alkyl group having 1-20 carbon atoms or the like; a represents an integer of 0-3; and b represents an integer of 0-4.)