MEDIUM ENERGY ION SCATTERING SPECTROMETER

PURPOSE: A medium energy ion scattering spectrometer is provided to precisely analyze the movement of atoms at a surface and interface by measuring accurate scattering angle and position of ion beam according to time. CONSTITUTION: A medium energy ion scattering spectrometer comprises an ion source(...

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Bibliographic Details
Main Authors KIM, JU HWANG, YU, KYU SANG, YI, YEON JIN, KIM, WAN SUP, MOON, DAE WON
Format Patent
LanguageEnglish
Published 10.02.2010
Subjects
COLORIMETRY
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
RADIATION PYROMETRY
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
TESTING
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Summary:PURPOSE: A medium energy ion scattering spectrometer is provided to precisely analyze the movement of atoms at a surface and interface by measuring accurate scattering angle and position of ion beam according to time. CONSTITUTION: A medium energy ion scattering spectrometer comprises an ion source(10), a collimator(20) which turns ion from the ion source into collimated beam, an accelerator(30), an ion beam pulse generator(40) which makes the accelerated ion beam into pulses to create ion beam flux, a concentration objective lens(50), a detector(60), and a data analyzer which transmits a detected spectral signal and analyzes data.
Bibliography:Application Number: KR20080075139